• Konferenzband

IECON 2013: 39th annual conference on IEEE Industrial Electronics Society ; Vienna, Austria, 10 - 13 November 2013

Publikationsdetails

Autor_innen
Institute of Electrical and Electronics Engineers (IEEE)
Publikationsjahr

2013

Verlag

IEEE

DOI
10.1109/iecon19023.2013
ISBN
978-1-4799-0223-1
URL
https://ieeexplore.ieee.org/xpl/conhome/6683943/proceeding

Sensor structures generated with combination of SU8 and PCBMEMS

Publikationsjahr

2013