Thin nanocrystalline diamond films deposited by LaPlas-CVD at atmospheric pressure

Publikationsdetails

Autoren	Frank Vollertsen, Prof. Dr. Knut Partes, Alexej Schubnov
Publikationsjahr	2010
Erschienen in	Production engineering : research and development
Seiten	9-14
DOI	10.1007/s11740-009-0194-9