Thin nanocrystalline diamond films deposited by LaPlas-CVD at atmospheric pressure

Publikationsdetails

Autor_innen	Frank Vollertsen,Knut Partes,Alexej Schubnov
Publikationsjahr	2010
Erschienen in	Production engineering : research and development
Seiten	9-14
DOI	10.1007/s11740-009-0194-9