Parametric system-level models for position-control of novel electromagnetic free flight microactuator

Publikationsdetails

Autor_innen	Arwed Schütz,Michael Olbrich,Siyang Hu,Christoph Ament,Tamara Bechtold
Publikationsjahr	2021
Erschienen in	Microelectronics reliability
DOI	10.1016/j.microrel.2021.114062