• Peer-reviewed
    • Open Access
    • Journalartikel

    Parametric system-level models for position-control of novel electromagnetic free flight microactuator

    Publikationsdetails

    Autor_innen
    Arwed Schütz,Michael Olbrich,Siyang Hu,Christoph Ament,Tamara Bechtold
    Publikationsjahr

    2021

    Erschienen in

    Microelectronics reliability

    DOI
    10.1016/j.microrel.2021.114062