• Peer-reviewed
    • Open Access
    • Journalartikel
    • Wissenschaftlicher Artikel

    Parametric system-level models for position-control of novel electromagnetic free flight microactuator

    Publikationsdetails

    Autoren
    M.Eng. Arwed Schütz, Michael Olbrich, M.Sc. Siyang Hu, Christoph Ament, Prof. Dr.-Ing. Tamara Bechtold
    Publikationsjahr

    2021

    Erschienen in

    Microelectronics reliability

    DOI
    10.1016/j.microrel.2021.114062